氦質(zhì)譜檢漏儀說明書翻譯-中英對(duì)照

 皖 儀 科 技

◎ 目   錄  ◎

◎ 目   錄  ◎
一  概述 4
 1-1概述 4
二  儀器介紹 5
 2-1儀器性能參數(shù) 5
2-1-1 SFJ-231B性能參數(shù) 5
 2-2儀器使用環(huán)境 6
2-2-1 SFJ-231B  使用環(huán)境 6
 2-3儀器結(jié)構(gòu) 7
2-3-1  儀器外觀 7
2-3-2  內(nèi)部結(jié)構(gòu)及部件 7
2-3-3 操作面板 9
2-3-4  電子系統(tǒng)示意圖 10
 2-4工作流程     10
2-4-1系統(tǒng)示意圖 10
2-4-2系統(tǒng)工作流程 11
三  使用方法 12
 3-1開始使用（以噴吹法為例） 12
 3-2其他檢漏方法的操作 15
3-2-1 吸入法檢漏 15
3-2-2 背壓法檢漏 15
3-2-3 檢大漏操作 15
四  維護(hù) 16
 4-1基本維護(hù)項(xiàng)目 16
4-1-1 漏率校準(zhǔn) 16
4-1-2  機(jī)械泵保養(yǎng) 16
4-1-3  分子泵維護(hù) 16
4-1-4  質(zhì)譜管及離子源清洗 17
五  常見故障和處理 18
 5-1常見故障和處理 18
 5-2 錯(cuò)誤代碼及其排除 19
六  附錄 20
 6-1氦質(zhì)譜檢漏儀的工作原理 20
 6-2氦質(zhì)譜檢漏儀的檢漏方式 20
 6-3常用單位的換算 21
6-3-1  壓強(qiáng)單位的換算 22
6-3-2  漏率單位的換算 23
 6-4常用檢漏方法 27
七 氦質(zhì)譜檢漏儀簡易操作說明 28
 1開機(jī) 28
 2 預(yù)熱和自檢效準(zhǔn) 28
 3 設(shè)定報(bào)警漏率，接工件，噴氦檢漏 28
 4停機(jī) 28
八  售后服務(wù) 29
 8-1售后服務(wù) 29
 

一  概述
1-1  概述
SFJ－231B型氦質(zhì)譜檢漏儀是對(duì)密封容器的泄漏進(jìn)行快速定位和定量測量的儀器。氦質(zhì)譜檢漏方法與氣泡識(shí)別法、壓強(qiáng)衰減法和鹵素檢漏等方法相比，具有檢測靈敏度高、速度快和適用范圍寬，此外氦質(zhì)譜檢漏儀選擇無毒、無破壞性、質(zhì)量輕的惰性氣體氦作為探索氣體，所以安全可靠。目前，檢漏技術(shù)在以下領(lǐng)域中得到了廣泛的應(yīng)用：
 科學(xué)研究
 航空航天
 汽車制冷
 軍事工業(yè)
 分析儀器
 發(fā)電廠
 核工業(yè)
 壓力容器
 精密機(jī)械加工
 醫(yī)療儀器/儀表
 真空爐、鍍膜設(shè)備等裝置或系統(tǒng)
 高真空和超高真空的工程
 半導(dǎo)體等行業(yè)
SFJ－231B型氦質(zhì)譜檢漏儀將為您提供更快速，更經(jīng)濟(jì)，更精確的檢漏方案。
 
二  儀器介紹
2-1  儀器性能參數(shù)
性  能  參  數(shù) 機(jī)       型 參      數(shù)      值
最小可檢漏率（Pa.m3/ s） SFJ-231B <5×10-12
響應(yīng)時(shí)間（s） SFJ-231B <2
啟動(dòng)時(shí)間（min） SFJ-231B <8
漏率指示范圍（Pa.m3/s） SFJ-231B 1×10-5～1×10-12
檢漏口允許最大壓力（Pa） SFJ-231B 300
線控器 SFJ-231B 有
雙燈絲自動(dòng)切換 SFJ-231B 有
允許質(zhì)譜管最大壓力（Pa） SFJ-231B 3×10-2
物理尺寸（長/寬/高） SFJ-231B 500×380×650
重量（KG） SFJ-231B 40左右
    
2-2  儀器使用環(huán)境

2-2-1 SFJ-231B  使用環(huán)境

機(jī) 型 環(huán)   境   參   數(shù) 極  限  條  件
SF-231B 環(huán)境溫度（℃） 0~40
 相對(duì)濕度 <80%
 供電電壓 單相~220V±10% ,50Hz
 最大工作電流（A） 6

注  意 
   
1、使用本產(chǎn)品前請(qǐng)確保儀器已可靠接地,嚴(yán)禁在沒有接地的情況下使用本產(chǎn)品！
如果因沒有可靠接地而造成的儀器損壞或人員傷亡，本公司不承擔(dān)任何責(zé)任。

2、儀器附近無強(qiáng)磁場干擾，無劇烈震動(dòng)，無腐蝕性氣體；室內(nèi)要有良好通風(fēng)，以防氦氣干擾。

2-3  儀器結(jié)構(gòu)

2-3-1  儀器外觀

編  號(hào) 部件名稱 備    注
1 檢漏口 被檢工件與檢漏儀的接口，KF-25接口
2 接收器 收集氦離子信號(hào)并放大
3 離子源 產(chǎn)生氦離子
4 質(zhì)譜室 離子飛行的腔體
5 真空計(jì) 共兩只，一只用于測量檢漏口真空，
另外一只用于測量分子泵排氣口真空值
6 分子泵 可使質(zhì)譜室達(dá)到高真空
7 組合閥座 完成氣路切換的工作
8 磁鐵 為離子旋轉(zhuǎn)提供磁場
9 電磁閥 實(shí)現(xiàn)氣路的通或斷
10 電氣盒 電氣控制都集中在此盒中（高壓危險(xiǎn)）
11 散熱風(fēng)扇 -----
12 機(jī)械泵 獲取低真空
13 標(biāo)準(zhǔn)漏孔 儀器效準(zhǔn)之用

編號(hào) 部件名稱 備    注
1 簡易操作說明 簡易的操作步驟
2 錯(cuò)誤代碼含義 錯(cuò)誤代碼的含義
3 漏率及其他相關(guān)情況顯示區(qū) 漏率及其他情報(bào)顯示窗口
4 漏率光柱顯示 與3同步顯示漏率
5 檢漏口壓力顯示 指示了當(dāng)前檢漏口的壓力
6 質(zhì)譜室壓力顯示 新款機(jī)器全部沒有此項(xiàng)
7 按鍵區(qū)域 按鈕所在的區(qū)域
8 工作狀態(tài)指示 顯示了當(dāng)前儀器的工作狀態(tài)
9 放氣/準(zhǔn)備就緒指示 參見下表說明
10 硬件調(diào)零 請(qǐng)參閱4-1-2硬件調(diào)零

 高靈敏/放氣/準(zhǔn)備就緒指示說明：
型號(hào) 高靈敏
度方式 按鍵 指示說明 備注
SFJ-231B 自動(dòng) 有「放氣」鍵
無「高靈敏度」鍵 上圖9區(qū)域顯示分別為：
準(zhǔn)備就緒和放氣 按「放氣」鍵可以更改停止時(shí)是否允許放氣，如允許則指示燈亮，反之不亮，當(dāng)系統(tǒng)準(zhǔn)備就緒時(shí)，準(zhǔn)備就緒指示燈亮，當(dāng)設(shè)定報(bào)警值< 1×10-10時(shí)儀器自動(dòng)進(jìn)入高靈敏方式，＞1×10-10時(shí)儀器處于正常檢漏狀態(tài)。

*  注：儀器進(jìn)入高靈敏方式后,分子泵處于休眠狀態(tài),信號(hào)較大,所以不宜按「標(biāo)漏」鍵,否則信號(hào)會(huì)溢出,使顯示值不正確,另外從高靈敏方式退出時(shí),可能會(huì)導(dǎo)致離子源重新加電，且啟動(dòng)時(shí)間較長。(建議正常工作一般不要用高靈敏) 

各模塊功能如下表所示：

模塊名稱 功   能   簡   介
C P U 整個(gè)電子系統(tǒng)的核心，協(xié)調(diào)所有的操作
顯示模塊 顯示漏率，壓力等情報(bào)
控制模塊 按鍵輸入以便完成相應(yīng)的操作
輸入模塊 采樣數(shù)據(jù)并傳送給CPU
RS232數(shù)傳模塊 與外部232設(shè)備通訊，也可接線控器
輸出控制模塊 控制繼電器，電磁閥的動(dòng)作，以實(shí)現(xiàn)檢漏、停止等操作和氣路切換
離子源電源模塊 控制離子源的電源
* 儀器運(yùn)行時(shí), 離子源電源模塊所在的“電氣盒”有高壓，請(qǐng)不要觸摸，請(qǐng)不要隨意打開機(jī)箱后蓋及電氣盒蓋。
2-4工作流程    以231為例

2-4-1系統(tǒng)示意圖

部件說明：
編 號(hào) 名  稱 備注
1 分子泵 可為質(zhì)譜室提供高真空，以便燈絲可以發(fā)射電子
2 分子泵排氣口 -----
3 真空計(jì) 測量分子泵排氣口的真空值
4 分子泵進(jìn)氣口1 抽速比主進(jìn)氣口，和進(jìn)氣口2要低，壓縮比最大
5 電磁閥V4 切換氣路
6 電磁閥V3 切換氣路

 

7 電磁閥V1 切換氣路
8 機(jī)械泵 獲取粗真空
9 電磁閥V2 切換氣路
10 電磁閥V6 切換氣路
11 標(biāo)準(zhǔn)漏孔 定標(biāo)之用
12 導(dǎo)管 加濾網(wǎng)后同大氣相連
13 真空計(jì) 測量檢漏口壓力
14 檢漏口 與被檢工件的接口
15 分子泵進(jìn)氣口2 抽速比主進(jìn)氣口低，壓縮比較大
16 質(zhì)譜室 ------
17 磁鐵 ------
18 接收器 接受氦離子信號(hào)
19 分子泵主進(jìn)氣口 與質(zhì)譜室相連

* 壓縮比：
 進(jìn)氣口1，進(jìn)氣口2，分子泵排氣口的氦氣濃度與主進(jìn)氣口處氦氣濃度的比值。

2-4-2系統(tǒng)工作流程
啟動(dòng)流程圖：

檢漏流程圖：（噴吹法為例）

* 詳細(xì)操作說明請(qǐng)參見下章

三  使用方法 
3-1  開始使用（以噴吹法為例）
3-1-1準(zhǔn)備工作：
 儀器搬運(yùn)到檢漏現(xiàn)場
 提供～220V+±10% ,50Hz的電源，并且確保有地線
 準(zhǔn)備好三芯的插座，并且確保插座的容量大于～250V*10A
 準(zhǔn)備好氦氣和噴槍及其他配件如：波紋管，卡箍等

3-1-2  SFJ-231B基本操作說明
1 啟動(dòng)

顯示區(qū)域

將檢漏口用專用堵頭堵住，接通電源,儀器開始加電
電源指示燈亮，同時(shí)漏率數(shù)碼顯示窗口，顯示HELLO，并有蜂鳴器鳴叫提示和光柱閃爍。

（圖片僅供參考，以實(shí)物為準(zhǔn)）
然后漏率數(shù)碼顯示窗口開始顯示計(jì)時(shí)，如上右圖所示（顯示內(nèi)容為XX S，含義為：系統(tǒng)從開始啟動(dòng)到目前所用時(shí)間），時(shí)間每10秒刷新一次。

工作狀態(tài)指示區(qū)域

機(jī)械泵啟動(dòng)，電磁閥V1開，機(jī)械泵開始對(duì)質(zhì)譜室抽真空（如下圖左所示）。

儀器進(jìn)入啟動(dòng)流程（詳見2-4-2 儀器啟動(dòng)流程），啟動(dòng)完成后工作狀態(tài)顯示（如上圖右所示），顯示區(qū)域?qū)�顯示“READY”（如下圖）。
！ 
 如果儀器是第一次使用或者停用很久后再次使用，質(zhì)譜室內(nèi)殘存氣體比較多可能會(huì)導(dǎo)致啟動(dòng)時(shí)間較長
 啟動(dòng)時(shí)最好不要讓檢漏口與大氣直通，建議使用專用堵頭堵住

2 設(shè)定

報(bào)警值設(shè)定：設(shè)定報(bào)警值

儀器在檢漏或待機(jī)（儀器顯示STOP或READY）狀態(tài)下，先將音量設(shè)定到 非0級(jí) 然后按「設(shè)定+」和「設(shè)定-」將報(bào)警值設(shè)定為工件要求值，設(shè)定完成后按「停止」鍵確認(rèn)保存存儲(chǔ)設(shè)定值并返回待機(jī)狀態(tài)。

音量設(shè)定：設(shè)定報(bào)警音量的大小

儀器在檢漏或待機(jī)（儀器顯示STOP或READY）狀態(tài)下，按「音量」鍵可將音量從0級(jí)到3級(jí)循環(huán)改變，設(shè)定完成后按「停止」鍵，存儲(chǔ)設(shè)定值并返回停機(jī)狀態(tài)（0級(jí)為關(guān)閉音量，3級(jí)為音量最大）。如在檢漏狀態(tài)就不用在按「停止」鍵。

* 標(biāo)漏的設(shè)定：

儀器在停機(jī)或待機(jī)（儀器顯示STOP或READY）狀態(tài)下，先將音量設(shè)定到0級(jí)，然后按「設(shè)定+」和「設(shè)定-」將顯示值更改為所使用標(biāo)漏值（若標(biāo)漏衰減要輸入當(dāng)前計(jì)量的新值），設(shè)定完成后按「停止」鍵，保存并返回待機(jī)狀態(tài)。
3 檢漏（噴吹法）

 儀器在待機(jī)（儀器顯示STOP或READY）狀態(tài)下，設(shè)定好報(bào)警值和效準(zhǔn)后，可按下「檢漏」鍵，等待儀器給工件抽真空，如果V1開了，可以對(duì)工件噴氦檢大漏；V3開，可以對(duì)工件噴氦檢中漏；V4開，可以對(duì)工件噴氦檢微漏（2-4-2檢漏流程）。
 檢漏過程中如果按下「標(biāo)漏」鍵，則標(biāo)漏閥V5開啟狀態(tài)改變。
4 調(diào)零（校零）

儀器處于檢漏狀態(tài)時(shí)，可按「調(diào)零」可扣除當(dāng)前本底信號(hào)，使儀器指示的讀數(shù)為絕對(duì)漏率。

5  停止

在待機(jī)或者檢漏狀態(tài)下，按下「停止」鍵即可使儀器進(jìn)入停止?fàn)顟B(tài)

* 高靈敏方式設(shè)定：是否采用高靈敏方式檢漏

 SFJ-231B
將報(bào)警值設(shè)定小于1×10-10。如要關(guān)閉高靈敏方式，可將報(bào)警值設(shè)定值設(shè)定大于1×10-10。

*停止時(shí)是否允許放氣的設(shè)定：設(shè)定檢漏停止后是否對(duì)被檢工件放入大氣
 SFJ-231B
 按「放氣」按鈕更改狀態(tài)，同時(shí)顯示區(qū)域9（見2-3-3節(jié)面板介紹）會(huì)給出相應(yīng)提示。如果檢漏完成后允許放氣則，放氣指示燈亮，反之，不亮。
5  標(biāo)漏校準(zhǔn)

將檢漏口用專用堵頭堵死，儀器在停止或待機(jī)（儀器顯示STOP或READY）狀態(tài)下，按下「檢漏」鍵，儀器開始自動(dòng)定標(biāo)，顯示窗口會(huì)顯示“-- -- -- -- --”如果信號(hào)大小正常，顯示區(qū)域顯示當(dāng)前的標(biāo)漏的設(shè)定值否則顯示區(qū)域顯示當(dāng)前標(biāo)漏已衰減到的百分?jǐn)?shù)（如下圖含義為標(biāo)漏信號(hào)為額定信號(hào)的49%）。定標(biāo)完成后下「停止」鍵即可存儲(chǔ)數(shù)據(jù)并使儀器進(jìn)入停止?fàn)顟B(tài)。

7  停機(jī)斷電

檢漏完成后確定儀器顯示“STOP”，將檢漏口有專用堵頭堵上即可，按下機(jī)箱后的電源按鈕關(guān)閉電，拔出電源插頭。

3-2  其他檢漏方法的操作

3-2-1 吸入法檢漏
吸入法檢漏的操作與噴吹法基本操作相同，所不同的是：檢漏口接的不是被檢測工件而是專用的吸槍。具體操作是：將被檢工件中被充入氦氣或氦-氮（空氣）的混合氣，將專用的吸槍連接到檢漏口，按下“檢漏” 按鈕，將吸槍吸嘴對(duì)著可以漏點(diǎn)。如果泄露大于設(shè)定值則儀器自動(dòng)報(bào)警。

3-2-2 背壓法檢漏

背壓法檢漏與噴吹法基本操作相同，只是，工件內(nèi)不要先壓入氦氣，然后再將工件放入檢漏罐中進(jìn)行檢漏。

 Helium mass spectrum leak detector of Model SFJ-231B  
 
◎ Appearance science and technology in Anhui
◎ Catalogue ¡ò

◎ Catalogue ¡ò
一  概述 4
1-1 summaries  4
 Introduction to two instruments  5
2-1 instrument performance parameters  5
 2-1-1 SFJ-231B performance parameter  5
Environment for use of 2-2 instruments  6
 2-2-1 SFJ-231B environment for use  6
2-3 instrument structure  7
2-3-1 instrument appearances  7
2-3-2 inside structure and part  7
2-3-3 operation panels  9
 2-3-4 electronic system sketch maps  10
2-4 workflow      10
2-4-1 systematic sketch maps  10
2-4-2 systematic workflow  11
 Three operation method  12
 3-1 begins to use ( Regard gushing out and blowing France as the example)   12
Operation of 3-2 other leak hunting methods  15
Suck the leak hunting of the law by 3-2-1  15
Carry and press the leak hunting of the law by 3-2-2  15
3-2-3 examining and leaking and operating greatly  15
 Four safeguarding  16
Safeguard the project basically by 4-1  16
Leaking rate 4-1-1 regulating  16
4-1-2  The mechanical pump maintaining  16
4-1-3  The molecule pump maintaining  16
4-1-4  Mass spectrum tube and ion source washing  17
 Five common troubles and dealing with  18
 5-1 common troubles and dealing with  18
5-2 Wrong code and getting rid of  19
 Six appendices  20
 Operation principle of 6-1 helium mass spectrum leak detector  20
 6-2 helium mass spectrum leak detector leak hunting ways  20
Conversion of daily unit 6-3  21
6-3-1  Conversion of the pressure unit  22
 6-3-2  Conversion of the leaking rate unit  23
6-4 daily leak hunting methods  27
 It explains 28 that seven helium mass spectrum leak detector is operated simple and easily
 1 starts the machine  28
 2 preheat and examine the result by oneself accurately  28
 3 establishes and reports to the police the leaking rate, connect work piece , gush out helium 28 leak hunting
4 shuts down  28
 Eight after-sale services  29
8-1 after-sale services  29
 

A summary
1-1 summaries
 SFJ- Model 231B helium mass spectrum leak detector is letting out instrument that the fast making a reservation and ration measured to sealed container . Helium mass spectrum leak hunting method and bubble discern that such methods as law , pressure decay in law and halogen and hunt leak are compared, high to have the sensitivity of measuring, it is wide with scope of application to be fast, in addition helium mass spectrum leak detector choose nonpoisonous, have destructiveness, quality light inert gas helium as exploring the gas, so safe and reliable. At present, leak hunting technology is widely used in the following field:
 Scientific research
 Aero-Space
 Automobile refrigeration
 Military industry
 Analytical instrument
 Power plant
 Nuclear industry
 Pressure container
 Accurate machining
 Medical instrument / instrument
 The device or the systems, such as vacuum stove , plating the membrane equipment,etc.
 High vacuum and exceeding the project of the high vacuum
Trades , such as semiconductor ,etc.
SFJ- Model 231B helium mass spectrum leak detector will offer to you faster, more economic, more accurate leak hunting scheme.

Introduction to two instruments
2-1 instrument performance parameters
Performance parameter  Model  Parameter value
Minimum can hunt leak ing rate (Pa.m3/ s )  SFJ-231B  <5* 10-12
Response time ( s)  SFJ-231B  <2
Start-up time ( min)  SFJ-231B  <8
The leaking rate points out the range (Pa.m3/s )  SFJ-231B  10-12
The leak hunting mouth allows the greatest pressure ( Pa)  SFJ-231B  300
Line accusing of device  SFJ-231B  Have
The pair of filament is switched over automatically  SFJ-231B  Have
Allow the mass spectrum to be in charge of the greatest pressure ( Pa)  SFJ-231B  3* 10-2
Size of physics ( It is long / wide / high)  SFJ-231B  500* 380* 650
Weight ( KG)  SFJ-231B  About 40

Environment for use of 2-2 instruments

2-2-1 SFJ-231B environment for use

Model  Environmental parameter  Limit condition
SF-231B  Environment temperature ( Degrees Centigrade)  0~40
 Relative humidity  <80%
 Voltage that supply power  Single-phase form 220V¡À 10%, 50Hz
 The biggest job electric current ( A)  6

Pay attention to  

1, please guarantee already reliable ground of the instrument before using a product, forbid using a product under having earth situation!
If the instrument damage or casualties incurred because of there is no reliable grounding, our company does not bear any responsibility .

2, there is no strong magnetic field to interfere near the instrument , has not shaken violently , there is no corrosivity gas; Ventilate well in the room, in case the helium is interfered.
 
2-3 instrument structure

2-3-1 instrument appearances

Serial number  Part name  Remarks
1 Leak hunting mouth  Examined in the interface of the work piece and leak detector, KF-25 interface
2 Receiver  Collect the helium ion signal and amplify
3 Ion source  Produce the helium ion
4 Mass spectrum room  A of body of the ion flight
5 The vacuum counting  Amounts to two, one is used for measuring a vacuum of leak hunting,
Another one is used for measuring molecule pump gas vent vacuum value
6 Molecule pump  Can make the mass spectrum room reach the high vacuum
7 Make the valve seat up  Work of finishing the angry way and switching over
8 Magnet  Offer the magnetic field for the thing that the ion is rotated
9 Electromagnetic valve  The ones that realize the angry way are open or broken
10 Electric box  Control and concentrate on this box electrically ( The high pressure is dangerous) 
11 Heat dissipation fan  -----
12 Mechanical pump  Obtain the low vacuum
13 Standard leak hole  The result of the instrument is used accurately

 Operation panel
 
2-3-3-1 SFJ-231B panel

Serial number  Part name  Remarks
1 Simple and easy operation explaining  Simple and easy operating sequence
2 Wrong code meaning  Meaning of the wrong code
3 Leaking rate and other relevant situation viewing areas  Leaking rate and other information show the window
4 The mere post of leaking rate shows  Show the leaking rate with 3 in step
5 A pressure shows in leak hunting  Have pointed out the pressure of the present leak hunting mouth
6 The pressure of mass spectrum room shows  New style machine does not all have this
7 Button area  Area where the button locates
8 The working state is pointed out  Have shown the working state of the present instrument
9 It is angry / ready to point out to release  Seeing and making forms proves
10 The hardware returns to zero  Please consult 4-1-2 hardwares and return to zero

Whether high and sensitive / angry / ready to is it prove to instruct.
Type  It is high and sensitive
One degree of ways  Button  Point out that explains  Remarks
SFJ-231B  Automatic  There are keys
There is not ' the high sensitivity ' key  It have pursue 9 the regional it show including:
It is ready to be angry with release  Press ' release angry ' , key can alter when stopping is it release angry to allowing , such as allow indicator lamp on, not bright on the contrary, when ready systematically, the ready indicator lamp is on, it is as establishing warning by value <instrument enter way not sensitive not high of automatically in on the one o'clock,> one o'clock in instrument by leak hunting state not normal.

*Note: After the instrument enters the high sensitive way, the molecule pump is in the dormancy state, the signal is relatively great, unsuitable to press ' mark and leak ' the key, otherwise the signal will overflow, will make the showing value incorrect, while withdrawing from the high sensitive way in addition , may cause the ion source to add the electricity again , and start-up time is relatively long. (propose that the normal work don't generally be used high sensitivly)  

The following watch shows every module function:

Module name  Brief introduction of function
CPU  The core of the whole electronic system, coordinate all operation
Show the module  Show the leaking rate, the information , such as pressure ,etc.
Control the module  Key in it in order to finish corresponding operation
Import the module  The data are conveyed to CPU to sample
RS232 counts and spreads the module  With 232 equipment communication of outside , can wire the accusing of device
Export and control the module  Control relay, movements of the electromagnetic valve, operate and switch over with the angry way in order to realize leak hunting , stop etc.
Ion source power module  Control the power in the ion source
*When the instrument runs , " electric box " that the ion source power module belongs to has high pressure , please don't touch , the case back cover of the please don't open at will ing machine and electric box cover.

2-4 workflow     Take 231 as an example

2-4-1 systematic sketch maps
 
The part is explained:
Serial number  Name  Remarks
1 Molecule pump  Can offer the high vacuum for mass spectrum room , so that the filament can launch electrons
2 Molecule pump gas vent  -----
3 The vacuum counting  Measure the vacuum value of the molecule pump gas vent
4 Molecule pump air inlet 1  Smoke the main air inlet of speed ratio, with 2 air inlet being low , compress than most heavy
5 Electromagnetic valve V4  Switch over the angry way
6 Electromagnetic valve V3  Switch over the angry way

 

7 Electromagnetic valve V1  Switch over the angry way
8 Mechanical pump  Obtain the thick vacuum
9 Electromagnetic valve V2  Switch over the angry way
10 Electromagnetic valve V6  Switch over the angry way
11 Standard leak hole  The ones that finalize the bid using
12 Pipe  Link to each other with the atmosphere after adding the filter screen
13 The vacuum counting  Measure a pressure of leak hunting
14 Leak hunting mouth  Interface of the work piece with examined
15 Molecule pump air inlet 2  It is low to smoke the main air inlet of speed ratio , compress greater
16 Mass spectrum room  ------
17 Magnet  ------
18 Receiver  Accept the helium ion signal
19 Main air inlet of molecule pump  Link with mass spectrum room

*Compression ratio:
Air inlet 1, air inlet 2, the density of helium of the molecule pump gas vent and ratio of the main density of place helium of air inlet .

2-4-2 systematic workflow
Start the flow chart :

*It proves that please see the chapter to operate in detail

Three operation method  
3-1 begins to use ( Regard gushing out and blowing France as the example) 
 3-1-1 preparation :
 The instrument carries to the leak hunting scene
 Offer - 220V +¡À 10%, the power of 50Hz, and guarantee that there is ground wire
 Get the socket of three core ready, and the capacity of guaranteeing the socket is greater than- 250V *10A
Get helium , spray gun and other fittings ready, for instance: Corrugated pipe , the caliper ,etc.

3-1-2  SFJ-231B operates basically to prove
1 starting

Show the area

Hunt leak mouth with special-purpose to stop up hair stop up, putting through the power, an instrument begins to add the electricity
The power indicator lamp is on, at the same time the leaking rate number shows the window, shows HELLO, and there is the buzzer that pipes and points out glimmering with the mere post.

(picture is only for reference, subject to material object)
Then the leaking rate number shows that the window begins to show that times, the right picture shows (show the content as XX S, meaning is as above: System from is it start time spent up till now to begin), time break once one second while being every.

The working state points out the area

The mechanical pump is started, electromagnetic valve V1 is opened, the mechanical pump begins to confront in the table room and smoke the vacuum (the following picture left shows).

The instrument enters procedure of starting (as shown in 2-4-2 instruments and start the procedure), the working status display after start and finish (pursue to show in right as above), show that the area will show " READY " (the following picture ).
 
 If the instrument is the first time have used or stopped using for a long time and used again, there is more remaining gas may cause start-up time longer in the mass spectrum room
 You had better not let leak hunting mouth and atmosphere direct while starting , propose using and stopping up the head to stop up special-purposly

2 establishing

Warning value is established : Establish warning value

The instrument or awaits the opportune moment (the instrument shows STOP or READY) under the state in leak hunting, it is volume been first establish 0 grades then according to ' establish + ' with ' establish - ' establish work piece request value not warning, press ' stop ' the state that the key confirms keeping and storing the establishing value and returning to await the opportune moment after establishing and finishing.

Volume is established : Establish the size of warning volume

The instrument or awaits the opportune moment (the instrument shows STOP or READY) under the state in leak hunting, the keys can change volume from 0 grades to 3 grades of circulation to press ' volume ', establish after finishing pressing keying , store person who establish and return state of shutting down (0, for volume of shutting off, 3 grades are the greatest for volume). If needn't be pressing ' stopping ' the key in the leak hunting state.

*Mark the settlement leaking :

3 The instrument is under the state of shutting down or awaiting the opportune moment (the instrument shows STOP or READY ), establish volume to 0 grades first , then according to ' establish + ' and ' establish - ' showing value alter for using not marking not leaking value (if mark not leaking not decaying not costing value not new where introduction measure at present), press ' stop ' the key after establishing and finishing, the state that keep and return to await the opportune moment.
4 
5 
6 
 Leak hunting ( Gush out and blow France) 
 
 The instrument is under awaiting the opportune moment (the instrument shows STOP or READY) the state, after establishing warning value and result well accurately, can push the ' leak hunting ' key , wait for the instrument to smoke the vacuum for the work piece , if V1 has been opened, can gush out the helium to examine and leak to the work piece greatly ; V3 is opened, can gush out the helium to leak while examining to the work piece ; V4 is opened, can gush out the helium to examine and leak to the work piece a little (2-4-2 leak hunting procedure).
7 If pushes ' marks and leaks ' the key in the leak hunting course, mark and leak valve V5 to open the state to change.
Return to zero ( Zero schools) 

The instrument is at the leak hunting state, according to ' return to zero ' can deduct this bottom signal at present , make reading that instrument point out for leaking rate definitely.

5 stopping

Under awaiting the opportune moment or leak hunting state, push ' stop ' the key can make the instrument enter the state of stopping
 *The high sensitive way is established : Whether adopt high sensitive way leak hunting
 
SFJ-231B
Establish warning value and is smaller than 1* 10-10. If will close the high sensitive way , can establish and is greater than the establishing value of warning value 1* 10-10.

 *Whether allow to release angry settlement while stopping. After establishing leak hunting stop to examine work piece put atmosphere into  
 SFJ-231B
8 Press ' release angry ' , button alter state , show area 9 (meet 2-3-3 sections of panels recommend ) can provide the corresponding suggestion at the same time. If leak hunting allows to release after being finished angry, it is on to release the angry indicator lamp, on the contrary, not bright.
9 
Mark and leak and regulate

Hunt leak mouth with special-purpose to stop up head stop up extremely, the instrument is under the state of stopping or awaiting the opportune moment (the instrument shows STOP or READY ), push the ' leak hunting ' key, the instrument begins to finalize the bid automatically, show that the window will show " -- --------"If the signal is normal in size, show that the area shows otherwise the settlement value that the present mark leaks shows that the area shows that marks leaking the percentage that has already decayed at present (the following picture meaning is in order to mark the signal of leaking as 49% of the specified signal). Make after finalizing the bid and finishing ' stop ' the key can store the data and make the instrument enter the state of stopping .

7 shuts down and cuts out

Confirm that the instrument shows " STOP " after leak hunting is finished, hunt leak mouth have special-purpose to stop up head is it have to stop up , push plane power knob after the case shut off electricity, pull out the plug.

Operation of 3-2 other leak hunting methods

Suck the leak hunting of the law by 3-2-1
Whether suck operation , law of leak hunting and is it blow law operate the same basically , a different one to gush out. What the leak hunting mouth is connected is not measured the work piece but special-purpose sucking rifles . It is operated that concrete: It is angry that the ones that will be examined the work piece and be filled and entered the helium or helium - nitrogen (air ) will be mixed, will connect special-purpose breathing in the rifle to the leak hunting mouth, push " leak hunting " button , will suck rifles and can leak and click to make to suck the mouth be facing toward. If reveal and is greater than the instrument autoalarm of establishing value.

Carry and press the leak hunting of the law by 3-2-2

Carry and press the leak hunting of the law it with gush out and blow France to operate basically the samly , just , don't press the helium first in the work piece , then put the work piece into the leak hunting pot and carry on leak hunting.

 武漢翻譯公司報(bào)價(jià)

2012.11.14